Purgemeter P-810

The P-810 is ideal for measuring the flow rates of various gases in semiconductor production. High reliability is ensured by circumferential seals.
The P-810 has a solid track record in applications with various devices.
Electrolytically polished models with low leakage are also available.
Gas flow measurement in semiconductor production equipment, especially for low-leakage lines
Measuring fluid Gases
Liquid (Equivalent to water:Density 1.0g/cm³
Viscosity 1.0mPa・s)
Measuring range Air Min. 5 to 50 mL/min(nor)
Max. 6 to 60 L/min(nor)
Water Min. 5 to 50 mL/min
Max. 0.2 to 2 L/min
・ When selecting a fl ow range, refer to "Index& Quick Reference for P Series Purgemeters" (TG-S0001).
Range ability 10 : 1
Indication accuracy ±3% F.S.
Fluid pressure Max. 0.8 MPa
Fluid temperature Max. 120ºC (Depends on the gasket material)
Material Wetted parts SCS14 (Standard), SUS316 (Electrolytically polished)
Tapered tube Heat-resistant glass
Gasket Fluoro rubber (Max. 120ºC)
Chloroprene rubber (Max. 80ºC)
・The maximum fl uid temperature for each gasket material may vary depending on usage and ambient conditions.
Mounting plate SUS304
Cover Transparent PVC
Process Connection Rc : 1/4"(Standard), 1/8"
NPT : 1/4", 1/8"
SW : 1/4", 3/8"
VCR : 1/4", 3/8"
Mounting Lock nut mount on the panel front (Standard)
Bezel mounting
Mass approx. 0.6Kg